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Like many companies, $2 billion process-control system manufacturer KLA-Tencor Corp. of San Jose, Calif., came to a realization not long ago that its 20 separate divisions were buying a lot of the same materials. Historically, the company’s structure was decentralized and its business units were given freedom to source wha…
http://www.sichinamag.comhttp://article.sichinamag.com/2007-02/2007211041949.htm -- 2007-2-11 0:00:00
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ALEXANDRIA, Va., Nov. 6 -- Khiem Nguyen of San Jose, Calif., Peter Satitpunwaycha of Santa Clara, Calif., and Alfred W. Mak of Union City, Calif., have developed an apparatus for supporting a substrate. According to the U.S. Patent & Trademark Office: "Method and apparatus for supporting and transferring a substrat…
http://www.sichinamag.comhttp://article.sichinamag.com/2006-11/2006118063054.htm -- 2006-11-8 0:00:00
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实时在线集成膜厚测量系统（IsTMS）用于膜厚量测以及在线监控；同时也能够测量材料的反射率和消光系数。设备与PECVD、CVD、Etch和CMP等工艺设备相互整合，在硅片离开工艺腔室后，返回FOUP或硅片盒前，对硅片进行厚度测量。系统具备整…
http://www.sichinamag.comhttp://article.sichinamag.com/2005-9/2006112143052cf621.htm -- 2005-9-15 0:00:00
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The AP-1000 system with HTP (high-throughput) shelves combines the reliability and process quality of the standard AP-1000 system with the proven benefits of March's proprietary shelf design. The AP-1000 HTP system optimizes use of the reactive ions found in RF plasma, increasing treatment uniformity while decreasing proce…
http://www.sichinamag.comhttp://article.sichinamag.com/2005-1/2006112143051e1ff7.htm -- 2005-1-6 0:00:00
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