PCT Systems will introduce at Semicon West in San Francisco in July the next and newest generation of megasonics cleaning for the semiconductor industry and other high technology applications. The PCT Systems Model 9400 Megasonic generators are specifically designed for today’s fine geometries and fragile wafer features. W…

http://www.sichinamag.comhttp://article.sichinamag.com/2008-06/2008611105918.htm -- 2008-6-11 0:00:00

document.write("")Megasonic Cleaning with Frequency Sweep: Some Test Results关于频率扫描兆声清洗技术的一些测试结果Dr. R. Nagarajan, Professor, Department of Chemical Engineering,India; Crest Ultrasonics兆声清洗可以清除亚微米的污染且不会出现超声清洗因成穴诱生的蚀损斑；…

http://www.sichinamag.comhttp://article.sichinamag.com/2007-09/200793052559.htm -- 2007-9-3 0:00:00

Akrion, Inc.日前在美国联邦法院向Solid State Equipment Corporation（以下简称SSEC）提起诉讼，状告后者侵犯了其6项与兆声辅助清洗相关的专利。Akrion声称，SSEC销售的部分单晶圆兆声清洗设备侵犯了Akrion拥有的一项或多项发明专利。 Akrion公司总裁Jim Moli…

http://www.sichinamag.comhttp://article.sichinamag.com/2007-04/200744102429.htm -- 2007-4-4 0:00:00