时间:2005年3月17 | 地点:上海浦东新区张江高科技园区

 

Semiconductor International China成功举办"成品率提升"研讨会

《Semiconductor International China 》于2005年3月17日SEMICON China期间成功举办了“成品率提升”研讨会。我们邀请了各大半导体制造厂主管介绍其在半导体制造成品率提升方面的经验。部分设备与材料厂商也介绍了其在提升成品率方面的工艺与方法。《Semiconductor International》主编Peter Singer做了半导体制造技术的新挑战的主题演讲。

中国半导体制造业制造正在快速增长,业界预计今年中国半导体制造业销售额将达到180亿美元,将是2003年的三倍。新技术与新设备的引进使我们面临更多的成品率方面的挑战。此次我们邀请了各大半导体制造厂主管,部门经理和供应商共聚一堂,共同探讨了各种半导体工艺问题与解决方案,内容涉及fab的管理、新材料如何提高成品率、扩散工艺的颗粒控制、光刻工艺的CD控制、CMP工艺缺陷控制、湿法清洗的颗粒去除、fab软件以及其它与提升成品率相关的各种工艺解决方案。

演讲嘉宾
演讲题目
在线播放  
资料下载
 张未名 《半导体国际》中文版 出版总监 《半导体国际》中文版简介
 
谢瑞津 Diffusion & CMP部门经理  GSMC 优化SC1清洗和QDR 冲洗条件以提高成品率
 Manny Gonzales Applications Engineer
Poco Graphite, Inc-USA.
Simon Shen
Applications Engineer
Poco Graphite, Inc.-Shanghai Rep.Office
采用新材料改善成率品
Rajan Rajgopal,Director,Process Integration & Defect Density  Chartered Semiconductor 先进技术良率提升方法的进展
Victor Gill, Vice president, Wafer Inspection Group ,KLA-Tencor 通过先进工艺控制降低从研发到量产的成本
王立   产品处/ FA 经理  中芯国际SMIC SRAM FA方法
Dr. Charles Lin
Director of Product Management
FSI
通过CryoKinetic Aerosol 工艺减少缺陷,提高成品率
Peter Singer  Editor in Chief  Semiconductor International IC制造面临的新挑战
李文强 工艺研发科主任  华虹NEC (HHNEC) 降低多晶硅刻蚀缺陷
Min Zhang SMIF 通过隔离技术提交成品率的十种最佳方法
 
孙岳懋(James Sun)  产品工程及测试服务营运管理部经理  TSMC 系统迅速提高成品率

演讲
演讲人介绍

韩瑞津
扩散&CMP 部门经理

GSMC (宏力半导体)

韩瑞津博士1992年在马里兰大学College Park分校化学工程学院获得博士学位。之后,作为博士后在Research Triangle Park, NC.的CIIT进行了为期三年的呼吸病毒学研究。他曾在St. Peter, MO MEMC的技术研发部门,负责200mm晶园清洗槽的设计,工艺研发和全球推广。2000年,韩博士加入位于Santa Clara, CA 的Intel D2,负责P858/P803的工艺持续改善和P860/P804/P805/P848/P893/P894铜湿洗的研发。目前,他担任GSMC Diffusion & CMP的部门经理,负责技术转移和所有产品包括铜工艺线的研发。
Manny Gonzales
Applications Engineer, Poco Graphite, Inc-USA.

Simon Shen
Applications Engineer, Poco Graphite, Inc.-Shanghai Rep. Office

 

Mr.Gonzales background is Process Development and Process Engineering in both R&D and Manufacturing Fab environments.

Mr.Shen has an extensive background in graphite technology and applications support.

Rajan Rajgopal

Chartered Semiconductor

Director, Process Integration & Defect Density Chartered Semiconductor

Victor Gill

KLA-Tencor Corporation

Victor Gill is Vice President, Business Development at KLA-Tencor Corporation. His 12-year career with the company also includes roles in applications engineering, product marketing, and internal sales. Mr. Gill has expertise in device process engineering, and has spoken extensively on the advantages of inline defect reduction.

王立 Wang Li
产品处/ FA 经理
Product Div./ Product FA Dep. Manager

SMIC(中芯国际)

1995年毕业于台湾淡江物研所,1997开始从事半导体方面的工作,在SRAM 和Logic产品方面有8年的经验,现担任中芯国际产品处/ FA 经理。

Dr. Charles Lin

FSI

Dr. Charles Lin is Director of Product Management for FSI International, Asia. He joined FSI in 2003. Prior to joining FSI, Dr. Lin worked for both Winbond Electronic Corp. (1991-2000) and Suntek Semiconductor Corp. (2000-2003). He received his Ph.D. and master degree in Materials Sci. & Eng. and MBA degree in Management of Technology all from the National Chiao-Tung University in Taiwan. He currently holds 13 U.S. patents, 18 Taiwan patents and has authored or co-authored over 40 papers on semiconductor process engineering.

李文强 Li Wenqiang
TD刻蚀部主任 (R&D Director)

HH NEC(华虹NEC)

2004年4月担任华虹NEC TD刻蚀部主任,1995年开始在Wafertech LLC, USA 担任工程师,之后在新加坡特许担任主任工程师

Professor Min Zhang

SMIF

Professor Min Zhang
Professional Experience in Microelectronics
Shanghai Institute of Metallurgy, Chinese Academy of Sciences, since 1958. SIM has changed to the name Shanghai Institute of Micro-system and Information Technology in 2003 according to its long period existing research fields.
Professor, PhD supervisor, since 1985, retired at 2002;
Deputy Director of SIM, CAS, 7/87 to 6/97;
Vice President, Shanghai Microelectronics Research & Development Center, 7/88 to 7/97;
Chief Executive Officer, Shanghai Microelectronics National Engineering Research Center, 7/91-7/98;
National Research and Resource Facilities for Submicron Structure, Cornell University, Ithaca, NY, USA;
The 7th, 8th National People Congress of China 3/88-3/98 People Representative;

孙岳懋(James Sun)
产品工程部经理

TSMC(台积电)

台湾国立交通大学电机工程系学士,作为工艺工程师,在台积电有6年6寸和12寸晶圆制造的经验。四年产品工程师和经理的经验。负责多种技术、不同产品(从0.50um 到0.15um )和北美、日本、欧洲和亚洲的客户服务。