| 《半导体国际》成功举办
"晶圆清洗技术" 研讨会
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2005年7月21日，由《半导体国际》举办的"晶圆清洗技术"研讨会在上海张江成功举行！
本次研讨会共吸引了超过180位相关领域的工程师和技术人员到场参加，涵盖了几乎所有中国大陆的晶圆制造厂，包括中芯国际、华虹NEC、宏力半导体、先进半导体、新进半导体等等，海力士（无锡）和和舰科技等公司也派代表专程赶来参加。同时，到场的听众还有来自封装测试公司、IC设计公司及科研单位的相关人员。
来自Semitool Inc、FSI International、SEZ、中芯国际、华虹NEC和中科院光电研究院的专家们就他们现在所使用的清洗技术和在实际生产中的解决方案为到场的观众带来了精彩演讲，整个研讨会现场气氛热烈，每位嘉宾后总能引来长时间的提问。内容的实用性无疑是本次研讨会最大的亮点，相信给每位参加研讨会的听众带去了收获。
研讨会后，《半导体国际》对此次参加研讨会的人员组成，演讲效果和工程师在工作中所关注的实际问题等等，进行了一个简单的读者调查，我们在此和广大读者共享调查结果。 |
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| 演讲人 |
演讲人介绍 |
朱林博士,
Semitool, Inc
大中华地区销售总监 |
Born in Beijing in 1962；
B.S E. E. Tsinghua University, Beijing, China, 1985；
Research Fellowship, Technical University, Munich,
Germany, 1987-1989；
Ph. D. Physics, Montana State University, 1995；
Project Engineer, Technology Development Manager,
Tosoh SMD Inc. 1996-2002；
General Manager, Tosoh SMD Taiwan, LTD. 2002-2005
；
Director of Sales, Greater China, Semitool, Inc. 2005
– now. |
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林启发博士,
FSI国际有限公司亚洲区产品管理总监
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| Dr. Charles Lin is Director of Product Management
for FSI International, Asia. He joined FSI in 2003.
Prior to joining FSI, Dr. Lin worked for both Winbond
Electronic Corp. (1991-2000) and Suntek Semiconductor
Corp. (2000-2003). He received his Ph.D. and master
degree in Materials Sci. & Eng. and MBA degree
in Management of Technology all from the National
Chiao-Tung University in Taiwan. He currently holds
13 U.S. patents, 18 Taiwan patents and has authored
or co-authored over 40 papers on semiconductor process
engineering. |
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陈良仁
SMIC/FABZ CST经理
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| Born in Sibu, Sarawak, Malaysia in 1970.BSc. Major
in Physics & Microelectronics, Campbell University
USA, 1999; Process Engineer, CMP team, 1stSilicon
Sdn. Bhd., Kuching, Sarawak, Malaysia. 1999-2002;Senior
Process Engineer, Principal Engineer, CMP Team, SMIC(Shanghai)
Corp., Shanghai, China. 2003-2004; Section Manager,
CST/ WET team, SMIC (Shanghai) Corp., Shanghai, China.
2004-now. |
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陈逸萍 SEZ亚太区技术和市场部协理
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| Lucy Chen (Yi_Ping Chen), is Director of Technology
and Marketing, SEZ Asia-Pacific. She joined SEZ Taiwan
in 2001 as the process manager responsible for the
development of a new application with Taiwan customer
and coordination the process field issue. Appointed
technical marketing in 2004, she furthered SEZ’s global
marketing with new application development and strategy.
Chen received a master’s degree in chemistry in 1996
from National Chiao-Tung University of Science and
Technology, Taiwan. |
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荣毅 华虹NEC工程部WET-ONLINE科科长
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| Graduated form South-East University in 1988, Mater
Degree. Now is the Department Manager of Engineering-3
Division, WET-ONLINE Department, Shanghai HuaHong
NEC Electronics Company, Limited. |
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王守国 中国科学院光电研究院、中国微电子研究所 研究员
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| Prof. Wang Shouguo Got Ph.D from Institute of Plasma
Physics, Chinese Academy of Science in 1997, and completing
postdoctoral researches respectively at Shandong Univ.,
Korea Univ. and Essen Univ. from 1998 to 2002, and
joined the Institute of Microelectronics, Chinese
Academy Sciences in 2003, and transfered to Academy
of Opto-electronics, Chinese Academy of Sciences recently.
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