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Backside etch process application
on DRAM manufacturing
芯片背面蚀刻在DRAM制造上的应用 |
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Oasis Single-wafer Wet
Clean Technology Overview |
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Single Wafer Wet-Processing
for Post Etch Polymer Residual |
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Microcontamination Control
in Advanced Wet Processing in Semiconductor Manufacturin |
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PLASMA TECHNOLOGIES IN
ADVANCED PACKAGING INDUSTRIES
等离子技术在高级封装工业的应用 |
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Low Cost, High Performance
Batch Spray Cleaning Solution for FEOL /BEOL PR /PAC
ASpplication |
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| 8月31日，上海浦东龙东商务酒店，由《EM
China电子制造》和《Semiconductor International半导体国际》中文版组织的半导体清洗技术研讨会吸引了156名工程师、教授与技术经理汇集一堂，与来自中芯国际、SEZ、Applied
Materials、Mykrolis、March Plasma Systems和FSI的技术专家共同探讨半导体清洗相关技术...>>> |
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BIOGRAPHY OF HAN-WEN CHEN
Han-Wen Chen, Ph.D, joined
Applied Materials (Santa Clara, CA) in 2001
via the corporate NCG (New College Graduate)
Program. Dr. Chen is currently a Process Engineer
working on wet cleaning process development,
customer demos, and process support on customer
site for the NBNP (New Business and New Product)
Group. In 2001 Dr. Chen received his Ph.D
in Mechanical Engineering from The University
of Michigan, Ann Arbor, MI. |
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·Single
Wafer Wet-Processing for Post Etch Polymer
Residual
BIOGRAPHY OF
Lucy Yi_Ping Chen
Lucy Yi_Ping Chen, is responsible
for technical marketing at SEZ in Asia Pacific.
She joined SEZ Taiwan in 2001 as the process
manager responsible for the development of
a new application with Taiwan customer and
coordination the process field issue. Appointed
technical marketing in 2004, she furthered
SEZ’s global marketing with new application
development and strategy. Chen received a
master’s degree in chemistry in 1996 from
National Chia-Tung University of Science and
Technology, Taiwan. (Chen can be reached at
+886/3/5727890 ext 305 or lchen@tw.sez.com) |
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BIOGRAPHY OF Guo Min
Guo Min is the Regional Manager
of Mykrolis China. Mykrolis is the former
microelectronics division of Millipore Corporation
. Prior to its separation from Millipore in
August 2001, Guo Min was the sales Manager
of the Microelectronics Division in Asia.
Mr. Guo has been in the China Semiconductor
market for 10 years. Prior to joining Millipore,
Mr. Guo was working Philips Semiconductor.
Mr Guo holds a bachlor’s degree in Chemistry
from the East China University of Chemical
Technology. |
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BIOGRAPHY OF Dr. Jack Zhao
Dr. Zhao
is an applications scientist at March Plasma
Systems. He is responsible for process development,
technical support, and plasma contract services
at March's California facility. He holds a
doctorate in chemical engineering. Dr. Zhao
has worked in the semiconductor industry for
three years, and in the plasma application
field for ten years. |
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·Low Cost, High Performance
Batch Spray Cleaning Solution for FEOL /BEOL
PR /PAC ASpplication
BIOGRAPHY OF Dr. Charles
Lin
Dr. Charles Lin
is director of product management for FSI
International, Asia. He jointed FSI in 2003.
Prior to joining FSI, Dr. Lin worked for both
Winbond Electronics Corp (1991-2000) and Suntek
Semiconductor Corp. (2000-2003). He received
his Ph.D. and Master degree in Materials Sci.
& Eng. and MBA degree in Management of
Technology all from the National Chiao-Tung
University in Taiwan. He currently holds 13
U.S. patents, 18 Taiwan patents and has authored
or co-authored over 40 papers on semiconductor
process engineering. |
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