In-situ analysis of multi-component chemistries for wet processing
湿法制程多组分化学品的原位分析
Chenting Lin, Director of Business Development, Greater China,ECI Technology
光谱法和电阻分析法多用于单组分解决方案，而滴定法具有高精度和稳定性，但对于实时监控却显得过于缓慢；近红外光谱法（NIR）分析具有多种优势，对SC1、DSP+等溶液的分析应用。超低噪音的NIR分析法可以探测高稀释溶液光谱变化，采用的多通道技术可吸收多个组分光谱，并解析多个方程式以得到准确的结果，分析仪可同时监控组分浓度和工艺参数。
Speaker Bio.:
Dr. Lin received his Ph.D. degree from MIT in 1994. He has 14 US patents on semiconductor processing and/or integration. Dr. Lin als
o holds an MBA degree
from University of Florida. He oversees business in Asia Pacific for ECI Technology.
Abstract:
Modern trends in wet processing require real-time control of highly dilute multi-component solutions. This presentation illustrates the capability of a technological-enabling analytical tool. Ultra low noise level in combination with multivariate signal from diode-array spectrometer allows effective compensation for temperature and bubble-induced interferences, as well as selective determination of multiple components present in wide concentration ranges from ppm level to almost 100%.
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