Megasonic Cleaning with Frequency Sweep: Some Test Results
关于频率扫描兆声清洗技术的一些测试结果
Dr. R. Nagarajan, Professor, Department of Chemical Engineering,India; Crest Ultrasonics
兆声清洗可以清除亚微米的污染且不会出现超声清洗因成穴诱生的蚀损斑；通过图表比较430KHz的振荡频率，MSI 470KHz可达到更一致的清洗效果多重萃取法可同时量化清洗效率和潜在的侵蚀现象。
Speaker BIO.：
Prior to taking up his academic position in 2004, Dr. Nagarajan was a world-renowned expert in the areas of chemical integration and contamination control during his 15-year tenure with IBM Storage Systems Division (
SSD) in San Jose, CA. In the early ‘90s, he led IBM SSD’s efforts to eliminate ozone depleting chemicals in component-supplier processes, and was rewarded for his efforts with an Outstanding Innovation Award by IBM Corporation in 1993. Dr. Nagarajan was designated as an IBM Technical Resource in 2002, one among very few in North America. He has co-authored a book on “Contamination and ESD Control in High-Technology Manufacturing”, published by J Wiley & Sons, New York, NY in September 2006. In May 2007, he received the Maurice Simpson Award from the Institute of Environmental Sciences & Technology (IEST) for best paper in Contamination Control published in the IEST Journal. Dr. Nagarajan obtained his Ph.D. in Chemical Engineering from Yale University in 1986.
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